GHG Reduction
PFC Reduction ActivityIn compliance with the WSC's voluntary agreement on PFC reduction, SAMSUNG Electronics' Semiconductor Division agreed to reduce PFC emissions by 10% from 1997 to 2010. Although PFC emissions increase inevitably due to continuous industry growth and expansions in production, we reduced CO2 by 5.68 million tons since 1997 to date by applying various PFC reduction technologies.
CO2 Reduction by PFC Reduction (1997~2008)
SAMSUNG Electronics' Semiconductor Division has tried hard to reduce PFC emissions through increased use of gases with a relatively low global warming index (0% in 1997 → 82% in 2008), production optimization, use of an RPC (Remote Plasma Cleaning) to raise the PFC decomposition rate : 0% in 1997 → 93% in 2008), and PFC emission abatement (introduction of PFC emission abatement system : 0% in 1997 → 61% in 2008). SAMSUNG is constantly lowering CO2 emissions in manufacturing through continuous PFC reduction.
PFC reduction technology
PFC Treatment rate




