Equipment Safety

SAMSUNG Electronics Semiconductor Division is responsible for a wide range of environmental safety issues from ordering safe tools to their installation. At each phase of utilization, safety checks are made to ensure the equipment is safe in order to prevent accidents. We request equipment suppliers to comply with safety and environmental standards (for example SEMI S-2 or CE) as part of our basic requirements for facility safety.

Our facilities are developed with safety in mind. They comply with strict safety requirements when each one is set up, as well as during and after final inspection.

Since 2007, the submission of energy specifications based on SEMI S-23 (the standard for facility energy consumption) is mandatory to encourage equipment manufacturers to be sensitive to energy savings.

SAMSUNG carries out thorough and accurate facility safety management through a total equipment certification system (TECS). Since semiconductor processes use a wide variety of equipments and process changes take place frequently, TECS is a necessary tool for effective and accurate management of these processes.