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65nm technology

SAMSUNG’s 65nm process technology is a collaborative technology development initiative between SAMSUNG, IBM, Chartered and Infineon
65nm process offerings
  • 65nm : Common Platform Library
  • Various TR, Oxide and Backend stack options for customer's product and low-power version of LP process
  • L6LP
    - 3 SG TR variants (HVT, RVT, LVT)
    - 2 Oxide variants (SG, DG)
    - Low-cost version : 34 mask layer (6Metal)
65nm process offerings

note :

  • (1) Thin : Thin Gox
  • (2) Thick : Thick Gox
  • (3) O : 2.5V Stacked NFET or Optional 3.3V Process