90nm Technology
SAMSUNG licenses it bulk-CMOS 90nm process technology from IBM
90nm process offerings
- 90nm : SAMSUNG Own Library
- Flexible FET options : L9G (21), L9LP (14)
- Wide voltage range IO FET option with only one gate oxide : L9G (1.8/2.5/3.3V), L9LP (1.8/2.5V)
- Ultra low leakage process for mobile applications
- Cost effective process : VNCAP (BEOL) w/o additional mask, instead of MIM CAP, Low cost version with mask layer reduction (L9G - 34 mask layer w/ 6M)
- Reliable eFuse process w/o additional process step
note:
- (1) Thin : Thin Gox
- (2) Thick : Thick Gox
- (3) HD : High Density
- (4) HS : High Speed
- (5) LP : Low Power
- (6)
: Thin Gox - (7)
: Intermediate Gox - (8)
: Thick Gox




