ESD / EOS
fabrication
failure Analysis Flow
Failure Analysis Tools
Electrical Analysis
Bench Test
- Logic Tester (IMS)
- Memory Tester (MS3650)
- DC tester (HP4145, HP4062)
- Oscilloscope (TEK2465 series)
- Signal generator (Waveform, Function)
- E-Beam Probe System (IDS)
- Hot Electron Analyzer (HEA)
- Probe Station
- THERMO Stream
Physical Analysis
Reverse Etching
- Reactive Ion Etcher (RIE)
- Chemical Wet Station
- Polisher
- Focused Ion Beam System (FIB)
- Scanning Electron Micro-scope (SEM)
- Optical Scope
- Auger Electron Spectroscopy (AES)
- Transmission Electron Microscope (TEM)
- EDX
