April 14, 2000 in Social Responsibility News

SAMSUNG Electronics Develops New Substance for Gigabit ICs

SEOUL, Korea - April 14, 2000 - Reaching below the semiconductor circuit design rule of ten microns has long been considered beyond the realm of technological possibility. However, Samsung Electronics has developed a new photoresistance technology, used in lithography, that can break that formidable barrier. Until now, manufacturing technology and tools for argon fluoride (ArF), a light source for forming the minute circuits needed to commercialize devices with a memory capacity of one gigabit or more, has been developed. However, the photoresistance technology has not been able to satisfy requirements for high definition and etching resistance at the same time. Commercialization of 0.10-micron circuit devices has been made difficult by the Post Exposure Delay(PED) properties that alter the circuit patterns.

The new ArF photoresistance technology developed by Samsung Electronics simultaneously delivers outstanding definition and etching resistance as well as improved PED (Post Exposure Delay) properties. As a result, this substance will enable the rapid commercialization of next-generation technology.

In addition, Samsung has achieved outstanding characteristics in new circuit structures unlike those that have been proposed in the past. Thus, the company has secured basic technology needed for next-generation semiconductors, giving it a competitive edge in the development of ever-smaller circuits.
US and Japanese semiconductor companies have engaged in joint projects to develop technology for next-generation circuitry. Now that Samsung Electronics has become first to crack the 0.10-micron barrier, industry insiders say that the basic technology is available to make devices with capacities of one gigabit or higher in the market mainstream.

Samsung Electronics has applied for patents covering its new photoresistance technology in nine countries, including the US, Japan and Taiwan. Over the next decade, company officials expect to receive some US$6 million in royalties related to the new technology.
About Samsung Electronics
Samsung Electronics Co., Ltd., with 1999 sales revenue of US$22.8 billion is a world leader in the electronics industry. The Korea-based concern has operations in about 50 countries with 54,000 employees worldwide. The company consists of three main business units: Digital Media System, Semiconductors and Information & Communications Businesses. For more information, please visit our website, hhttp://samsungelectronics.com


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