Climate Action > Reducing Direct Greenhouse Gas Emissions

Reducing Direct Greenhouse Gas Emissions in DS Division

DS Division is making various efforts to minimize direct greenhouse gas emissions (Scope 1) from process gases used in semiconductor manufacturing and from fuel consumption such as LNG. To achieve this, we are implementing greenhouse gas reduction technologies that significantly improve process gas treatment efficiency, actively expanding the use of waste heat.

DS Division's carbon capture and utilization technologies

Managing Process Gas Emissions

We are actively working on reducing process gas emissions and continues to expand related investments.

  • Process gas treatment

    • Expand installations of large-scale process gas treatment systems (RCS)
    • Develop and apply new catalysts, and increase process gas treatment efficiency: Achieved 97% PFCs* treatment efficiency through the development and on-site application of 3rd-generation catalysts
    • * Perfluoro Compounds

  • Reducing process gas usage

    • Apply optimized recipes, including process time and steps, to minimize the usage of process gas
    • Improve the Chemical Vapor Deposition (CVD) process, one of the eight major semiconductor processes → Develop Minimum Input Stable Output (MISO) technology through Fully Optimized Recipe (FOR) and application of Byproduct Free Recipe (BFR)
      • - Developed a recipe to reduce NF₃ usage in the SiON process, cutting NF₃ consumption by approximately 25%
      • - Reduced greenhouse gas emissions since 2020 through continuous efforts to cut N₂O usage across all CVD processes

  • Developing alternative gases

    • Develop alternative process gases with low global warming potential and replace PFCs in some product processes
    • Developed and have been applying G1 gas as an alternative to C₄F₈ since 2018
    • Began application of G3 gas to replace CF₄ in 2025

RCS (Regenerative Catalytic System)

We developed and are using the semiconductor industy's first large scale integrated process gas treatment facility, known as RCS. RCS is a system that leverages a rooftop exhaust structure through which all gases emitted from equipment are discharged and it treats them collectively using catalysts. Compared to existing individual treatment facilities, RCS has the advantage of being able to treat process gases at lower temperatures, reducing fuel use and generating fewer air pollutants such as nitrogen oxides.

In 2024, four new RCS facilities were installed across one production line, bringing the total number to 52. Additionally, we developed and applied 3rd-generation catalysts on-site, improving PFCs treatment efficiency to 97%. We plan to continue expanding RCS installations to existing production lines, except in cases where installation is not feasible, as well as to new production lines.

RCS Treatment Process

  • (1)
    Pre-treatment scrubber

    Treats high concentration
    acidic gas

  • (2)
    RCS facility

    Uses catalysts to decompose PFCs
    (Perfluoro Compounds) at low
    temperatures

  • (3)
    Post-treatment scrubber

    HF
    (hydrogen fluoride) treatment

  • (4)
    Primary acid scrubber

    Primary
    treatment of acid gas with cleaning
    facilities

  • (5)
    Secondary acid scrubber

    Secondary treatment of acid gas to minimize
    air pollutant
    emissions

Reducing Fuel Use

We are actively working on optimizing operations, recovering waste heat, and developing fuel-free equipment to reduce fuel consumption at its business sites. At new production lines, we are expanding the use of waste heat before discharging industrial wastewater, and utilizing waste heat from cooling water throughout the year, not just in winter, to prevent temperature increases in external heaters. As a result, the waste heat utilization rate at the Giheung, Hwaseong, and Pyeongtaek sites had increased to 51% by 2024. We are also looking to expand waste heat recovery to existing production lines and aims to increase the waste heat utilization rate of new lines to at least 70%, with a goal of exceeding 90%. Additionally, we plan to continuously expand the adoption of facilities that can replace LNG-based heat sources. Through these efforts, we aim to minimize direct greenhouse gas emissions from our business sites.

  • Reducing LNG consumption

    • Recover waste heat from facility cooling water
    • Improve waste heat recovery efficiency through heat pump development
    • Explore the introduction of equipment that can replace LNG-based heat sources

Transitioning to Zero-Emission Vehicles

By 2024, we converted a total of 106 vehicles to zero-emission models (electric/hydrogen), reducing direct emissions.

Last updated June 27, 2025