From reducing carbon
emissions to capturing
emitted carbon to use as a
new resource
In 2021, we established the Carbon Capture Research Institute
(currently restructured as Air Science Research Center) to develop and commercialize carbon capture and utilization technologies that store
carbon emitted from semiconductor manufacturing sites and recycle it
as a resource.
Spearheaded by the center, we are advancing technologies across the
entire CO₂ capture, storage, and utilization lifecycle at industrial sites.
Our primary focus is securing fundamental technologies that
efficiently capture greenhouse gases while minimizing energy
consumption, ultimately converting them into useful resources. We
plan to implement these technologies at our manufacturing facilities
in phases.
Furthermore, we will contribute to the reduction of direct emissions by introducing technologies that capture and purify high-concentration
CO₂ from the semiconductor manufacturing process, repurposing it as
a recycled resource for our operations.
Process gas reduction
technology
DS Division operates gas treatment and processing facilities, assessing gas decomposition characteristics, emissions volume, and overall energy efficiency.
The RCS (Regenerative Catalytic System) mainly treats gases emitted from the etching process in a large-capacity, energy-efficient treatment facility.
We apply a POU (Point Of Use) to each production facility’s emissions during the CVD (Chemical Vapor Deposition) process to reduce emitted gases.
Reducing particulate
matter to improve
the quality of air
we breathe
In January 2019, we established the Air Science Research Center (previously Particulate Matter Research Institute) under DS Division, dedicated to developing fundamental technologies for next-generation filters and air purification systems. Its main research area is improving air purification performance by developing a filtration technology capable of removing both particulate matter and harmful exhaust gases simultaneously.
Energy efficiency is vital for air purification systems due to their long operating hours. To address this, the center initiated the development of a next-generation, low-energy air purification technology. The concept has now been successfully validated, with the equipment demonstrating at least 99% removal efficiency for particulate matter in lab-scale experiments. Moving forward, the center remains committed to further optimizing the system's energy efficiency.
As part of “Share the Clean Air” project, we also conducted a pilot test at the Hwaseong site to verify whether laboratory-developed air purification technology could be applied in actual site operations. The test confirmed approximately 98% particulate matter treatment efficiency under real operating conditions, and we are expanding application to supplier sites for long-term performance verification.
